System Integration

System Integration Solutions

System Integration Solutions

SMART FMS(Facility Management System) : multi-infrastructure integrated-management system
SMART FMS collects and analyzes data of various facilities in the process in real time to detect errors and
provides various charts on data to support all the technical functions and specific application functions necessary for smooth and stable operation of facilities.

Features

Real Time Monitoring

  1. Real-time monitoring of comprehensive status of facilities
  2. Evaluation of the status, performance, faults and alarms of facilities
  3. Customized monitoring screen

User Customized Aalarm

  1. Setting Admin, set user's alarm
  2. Setting alarm for each user

Trace / Summary Data View

  1. Analysis of specific parameter trends and comparison of parameters between equipment
  2. Trend analysis by analyzing long-term trace data
  3. Customized Report

Mailing

  1. Establishment of criteria and abnormality level for the case of serious abnormality
  2. Notification per e-mail according to the above grade

Messenger

  1. Messenger and MMS are sent to administrator when alarming
SMART CMS(Central Monitoring System) : Real-time central monitoring system
SMART CMS helps to protect customers' assets, minimize risk of service disruption, and
improve productivity by maintaining optimal status and predictive maintenance through real-time monitoring of various equipment status and
surrounding environment in semiconductor process.

Features

Real Time Monitoring

  1. Real-time monitoring of comprehensive status of facilities
  2. Providing storage image for status, performance, abnormality, and alarm of equipment through interworking with SMART FMS
  3. Customized monitoring screen