Vacuum Componets

Vacuum Components

Vacuum Components R&D Service

Product Type Benefit
Slit Valve Monovat Long life cycle, Particle reduction
Dual Blade Reduce shut down time, Efficient chamber maintenance available
L-Motion Mechanical lock / Pneumatically lock against differential pressure reinforcement
RPS isolation Valve Angle Long life cycle, Particle reduction, Patented gas flow guidance structure
Gate Long life cycle, Particle reduction, Extremely high temperature application, Protection ring mechanism, The optional cooling system
Gate Valve Manual Long life cycle, Cost Saving
Pneumatic Long life cycle, Cost Saving, Lightweight, The optional heating module
Protection Long life cycle, Superior performance at harsh processes, The optional direct heating module against powder deposition
Heating Particle reduction
Angle Valve Manual Long life cycle, Cost Saving
Pneumatic Long life cycle, Cost Saving, The optional heating module
Heating Particle reduction
in-line Long life cycle, High conductance
2 stage Long life cycle, Soft pumping module, Longer life cycle with The optional heating module
Butterfly Valve Manual Long life cycle, Cost Saving, Easy to maintenance and operation, The optional heating module
Pneumatic Long life cycle, Cost Saving, Compact structure, The optional heating module
APC Valve - Parts Throttle Long life cycle
Pendulum Long life cycle

Vacuum Components R&D Achievement

Product Performed Project
Slit Valve AMAT - Slit Valve Modification for CVD
RPS isolation Valve AMAT- RPS Valve for TEOS Process
Slit Valve LAM - Dual Blade Slit Valve for Etch Process
RPS isolation Valve LAM - RPS Valve for PEOX Process
RPS isolation Valve ASM - RPS Valve for ALD Process
RPS isolation Valve WONIK IPS - Particle Free RPS Valve for ALD/TEOS Process
RPS isolation Valve WONIK IPS - RPS Gate Valve for Mold Process
Angle Valve PSK - Advanced 2 Stage Valve for PSK Asher
RPS isolation Valve New Power Plasma - High Temperature RPS Valve
Gate Valve Pfeiffer Vacuum - Vacuum Pump Protection Gate Valve
Gate Valve Pfeiffer Vacuum - Vacuum Pump Gate Valve with Bonded Seal Gate
Gate Valve LAM -Protection Gate Valve for PE-CVD Process
Gate Valve KKT - Vacuum Pump Protection Gate Valve
Gate Valve Edwards - Vacuum Pump Auto Gate Valve
Gate Valve Ebara - Vacuum Pump Protection Gate Valve with Slow Pumping
Butterfly Valve R&D - Butterfly Valve For R&D facility
Gate Valve TEL - DN 50 Protection Valve
Angle Valve TEL - VEP1, VEP2 Angle Valve for Ti/TiN Process
Angle Valve SK hynix - Heated Angle Valve DN40
APC Valve AMAT - Throttle Valve ( Flapper ) For ACL Process
APC Valve Aixtron - Throttle Valve ( Flapper ) For MOCVD Process
APC Valve AMAT - Pendulum Valve ( Gate ) For Oxide Etch Process